Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10114289 | Exposure head, exposure apparatus and method of operating an exposure head | Jacobus Hubertus Theodoor Jamar, Herman Hendrikus Maalderink, Erwin Rinaldo Meinders, Erwin John Van Zwet, Henri Jacques Antoine Jean Starmans | 2018-10-30 |
| 9383195 | Lithographic apparatus and method | Wilhelmus Johannes Maria De Laat, Cheng-Qun Gui, Marcus Theodoor Wilhelmus Van Der Heijden, Erwin Rinaldo Meinders, Mária Péter | 2016-07-05 |
| 8570491 | System for patterning flexible foils | Erwin Rinaldo Meinders, Mária Péter, Wilhelmus Johannes Maria De Laat | 2013-10-29 |
| 8319174 | Scanned writing of an exposure pattern on a substrate having a spot size modulator and dual motor for moving the substrate table and a laser spot relative to each other | Erwin Rinaldo Meinders | 2012-11-27 |
| 8029973 | Lithographic method and carrier substrate | Wilhelmus Johannes Maria De Laat, Cheng-Qun Gui, Paulus Wilhelmus Leonardus Van Dijk, Erwin Rinaldo Meinders, Mária Péter | 2011-10-04 |
| 7245357 | Lithographic apparatus and device manufacturing method | Erwin John Van Zwet, Jan Van Elp, Johannes Hubertus Josephina Moors, Hendrik Antony Johannes Neerhof, Joost Jeroen Ottens +3 more | 2007-07-17 |
| 7088431 | Lithographic apparatus and device manufacturing method | Joost Jeroen Ottens, Johannes Hubertus Josephina Moors | 2006-08-08 |
| 6864957 | Chuck, lithographic projection apparatus, method of manufacturing a chuck and device manufacturing method | Jan Van Elp, Jacob Jan Van der Velde | 2005-03-08 |