Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9383195 | Lithographic apparatus and method | Wilhelmus Johannes Maria De Laat, Cheng-Qun Gui, Peter Theodorus Maria Giesen, Erwin Rinaldo Meinders, Mária Péter | 2016-07-05 |
| 8648997 | Member with a cleaning surface and a method of removing contamination | Mark Drewes Boerema, Matthias Ruhm, Mario Putz | 2014-02-11 |
| 8394572 | Method of preparing a substrate for lithography, a substrate, a device manufacturing method, a sealing coating applicator and a sealing coating measurement apparatus | Marco Koert Stavenga, Patrick Wong, Frederik Johannes Van Den Bogaard, Dirk De Vries, David Bessems +1 more | 2013-03-12 |
| 8114568 | Method of preparing a substrate for lithography, a substrate, a device manufacturing method, a sealing coating applicator and a sealing coating measurement apparatus | Marco Koert Stavenga, Patrick Wong, Frederik Johannes Van Den Bogaard, Dirk De Vries, David Bessems +1 more | 2012-02-14 |
| 7349071 | Pre-aligning a substrate in a lithographic apparatus, device manufacturing method, and device manufactured by the manufacturing method | Henricus Wilhelmus Maria Van Buel, Peter Ten Berge | 2008-03-25 |