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Method of manufacturing a pellicle for a lithographic apparatus, a pellicle for a lithographic apparatus, a lithographic apparatus, a device manufacturing method, an apparatus for processing a pellicle, and a method for processing a pellicle |
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Pellicle and pellicle assembly |
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Pellicle and pellicle assembly |
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Metal-silicide-nitridation for stress reduction |
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Simultaneous double-side coating of multilayer graphene pellicle by local thermal processing |
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2024-04-02 |
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Membrane for EUV lithography |
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| 11754918 |
Pellicle and pellicle assembly |
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2023-09-12 |
| 11686997 |
Metal-silicide-nitridation for stress reduction |
Pieter-Jan Van Zwol, Adrianus Johannes Maria Giesbers, Johan Hendrik Klootwijk, Evgenia KURGANOVA, Maxim Aleksandrovich Nasalevich +4 more |
2023-06-27 |
| 11467486 |
Graphene pellicle lithographic apparatus |
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2022-10-11 |
| 11347142 |
Pellicle and pellicle assembly |
David Ferdinand Vles, Erik Achilles Abegg, Aage Bendiksen, Derk Servatius Gertruda Brouns, Pradeep K. Govil +9 more |
2022-05-31 |
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Membrane for EUV lithography |
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2022-05-03 |
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Pellicle frame and pellicle assembly |
Anton Wilhelmus Duys, Maxim Aleksandrovich Nasalevich, Arnoud Willem Notenboom, Pieter-Jan Van Zwol, David Ferdinand Vles |
2022-04-26 |
| 11287737 |
Metal-silicide-nitridation for stress reduction |
Pieter-Jan Van Zwol, Adrianus Johannes Maria Giesbers, Johan Hendrik Klootwijk, Evgenia KURGANOVA, Maxim Aleksandrovich Nasalevich +4 more |
2022-03-29 |
| 11231646 |
Pellicle and pellicle assembly |
David Ferdinand Vles, Chaitanya Krishna ANDE, Antonius Franciscus Johannes De Groot, Adrianus Johannes Maria Giesbers, Johannes Joseph Janssen +18 more |
2022-01-25 |
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Membrane assembly |
Derk Servatius Gertruda Brouns, Paul Janssen, Mohammad Reza KAMALI, Willem Joan Van Der Zande, Pieter-Jan Van Zwol +2 more |
2021-06-15 |
| 10983431 |
Pellicle and pellicle assembly |
David Ferdinand Vles, Erik Achilles Abegg, Aage Bendiksen, Derk Servatius Gertruda Brouns, Pradeep K. Govil +9 more |
2021-04-20 |
| 10908496 |
Membrane for EUV lithography |
Maxim Aleksandrovich Nasalevich, Erik Achilles Abegg, Nirupam Banerjee, Michiel Blauw, Derk Servatius Gertruda Brouns +17 more |
2021-02-02 |
| 10712656 |
Method for manufacturing a membrane assembly |
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2020-07-14 |
| 10698312 |
Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane |
Pieter-Jan Van Zwol, Vadim Yevgenyevich Banine, Jozef Petrus Henricus Benschop, Florian Didier Albin Dhalluin, Luigi Scaccabarozzi +1 more |
2020-06-30 |
| 10466585 |
Pellicle and pellicle assembly |
David Ferdinand Vles, Erik Achilles Abegg, Aage Bendiksen, Derk Servatius Gertruda Brouns, Pradeep K. Govil +9 more |
2019-11-05 |
| 10228615 |
Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane |
Andrey Nikipelov, Vadim Yevgenyevich Banine, Jozef Petrus Henricus Benschop, Arjen Boogaard, Florian Didier Albin Dhalluin +5 more |
2019-03-12 |
| 9383195 |
Lithographic apparatus and method |
Wilhelmus Johannes Maria De Laat, Cheng-Qun Gui, Peter Theodorus Maria Giesen, Marcus Theodoor Wilhelmus Van Der Heijden, Erwin Rinaldo Meinders |
2016-07-05 |
| 9065016 |
Method for manufacturing a thermoelectric generator |
Erwin Rinaldo Meinders, Ruud Vullers |
2015-06-23 |
| 9000303 |
Method for preparing a patterned electric circuit |
Roland Anthony Tacken, Renatus Marius De Zwart, Erwin Rinaldo Meinders |
2015-04-07 |
| 8895438 |
Method for forming a multi-level surface on a substrate with areas of different wettability and a semiconductor device having the same |
Erwin Rinaldo Meinders |
2014-11-25 |