| 10444644 |
Lithographic apparatus and device manufacturing method |
Timotheus Franciscus Sengers, Sjoerd Nicolaas Lambertus Donders, Hans Jansen |
2019-10-15 |
| 10228615 |
Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane |
Andrey Nikipelov, Vadim Yevgenyevich Banine, Jozef Petrus Henricus Benschop, Florian Didier Albin Dhalluin, Alexey Sergeevich Kuznetsov +5 more |
2019-03-12 |
| 10146143 |
Lithographic apparatus and device manufacturing method |
Timotheus Franciscus Sengers, Sjoerd Nicolaas Lambertus Donders, Hans Jansen |
2018-12-04 |
| 9804509 |
Lithographic apparatus and device manufacturing method |
Timotheus Franciscus Sengers, Sjoerd Nicolaas Lambertus Donders, Hans Jansen |
2017-10-31 |
| 9773578 |
Radiation source-collector and method for manufacture |
Alexey Sergeevich Kuznetsov, Jeroen Huijbregtse, Andrey Nikipelov, Maarten Van Kampen |
2017-09-26 |
| 9594308 |
Lithographic apparatus and device manufacturing method |
Timotheus Franciscus Sengers, Sjoerd Nicolaas Lambertus Donders, Hans Jansen |
2017-03-14 |
| 9213247 |
Lithographic apparatus and device manufacturing method |
Timotheus Franciscus Sengers, Sjoerd Nicolaas Lambertus Donders, Hans Jansen |
2015-12-15 |
| 8830446 |
Exposure apparatus |
Timotheus Franciscus Sengers, Wilhelmus Sebastianus Marcus Maria Ketelaars, Carolus Ida Maria Antonius Spee |
2014-09-09 |
| 8711333 |
Lithographic apparatus and device manufacturing method |
Timotheus Franciscus Sengers, Sjoerd Nicolaas Lambertus Donders, Hans Jansen |
2014-04-29 |
| 8542341 |
Exposure apparatus |
Timotheus Franciscus Sengers, Wilhelmus Sebastianus Marcus Maria Ketelaars, Carolus Ida Maria Antonius Spee |
2013-09-24 |
| 7746375 |
Digital camera with panorama or mosaic functionality |
Wilhelmus Sebastianus Marcus Maria Ketelaars |
2010-06-29 |
| 7557901 |
Lithographic apparatus and device manufacturing method |
Thimotheus Sengers, Sjoerd Nicolaas Lambertus Donders, Hans Jansen |
2009-07-07 |
| 7450217 |
Exposure apparatus, coatings for exposure apparatus, lithographic apparatus, device manufacturing method, and device manufactured thereby |
Timotheus Franciscus Sengers, Wilhelmus Sebastianus Marcus Maria Ketelaars, Carolus Ida Maria Antonius Spee |
2008-11-11 |
| 7184122 |
Lithographic apparatus and device manufacturing method |
Timotheus Franciscus Sengers, Sjoerd Nicolaas Lambertus Donders, Hans Jansen |
2007-02-27 |
| 6764953 |
Electronic device, and method of patterning a first layer |
Jan Johannes Van Den Broek, Coen Theodorus Hubertus Fransiscus Liedenbaum, Andreas Hubertus Montree, Willem Reindert De Wild, Johannes Huiberts |
2004-07-20 |
| 6529116 |
Passive component |
Jan Johannes Van Den Broek, Richard Antonius Fransiscus Van Der Rijt, Martinus Hermanus Wilhelmus Maria Van Delden, Willem Reindert De Wild, Andreas Hubertus Montree |
2003-03-04 |
| 6509650 |
Electronic device, and method of patterning a first layer |
Jan Johannes Van Den Broek, Coen Theodorus Hubertus Fransiscus Liedenbaum, Andreas Hubertus Montree, Willem Reindert De Wild, Johannes Huiberts |
2003-01-21 |
| 6251171 |
Air cleaner |
Johannes Marra |
2001-06-26 |
