Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10698312 | Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane | Pieter-Jan Van Zwol, Vadim Yevgenyevich Banine, Jozef Petrus Henricus Benschop, Mária Péter, Luigi Scaccabarozzi +1 more | 2020-06-30 |
| 10228615 | Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membrane | Andrey Nikipelov, Vadim Yevgenyevich Banine, Jozef Petrus Henricus Benschop, Arjen Boogaard, Alexey Sergeevich Kuznetsov +5 more | 2019-03-12 |
| 10139725 | Lithographic apparatus | James Wiley, Juan Diego Arias Espinoza, Derk Servatius Gertruda Brouns, Laurentius Cornelius De Winter, Pedro Julian Rizo Diago +1 more | 2018-11-27 |