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Metal-silicide-nitridation for stress reduction |
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Simultaneous double-side coating of multilayer graphene pellicle by local thermal processing |
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Membrane for EUV lithography |
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Pellicle and pellicle assembly |
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Metal-silicide-nitridation for stress reduction |
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Graphene pellicle lithographic apparatus |
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Pellicle and pellicle assembly |
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Pellicle frame and pellicle assembly |
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Metal-silicide-nitridation for stress reduction |
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Pellicle and pellicle assembly |
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Lithographic apparatus comprising an object with an upper layer having improved resistance to peeling off |
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Pellicle and pellicle assembly |
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Sensor mark and a method of manufacturing a sensor mark |
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Membrane for EUV lithography |
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Pellicle and pellicle assembly |
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