| 12298663 |
Method of manufacturing a pellicle for a lithographic apparatus, a pellicle for a lithographic apparatus, a lithographic apparatus, a device manufacturing method, an apparatus for processing a pellicle, and a method for processing a pellicle |
Mária Péter, Adrianus Johannes Maria Giesbers, Johan Hendrik Klootwijk, Maxim Aleksandrovich Nasalevich, Wilhelmus Theodorus Anthonius Johannes Van Den Einden +5 more |
2025-05-13 |
| 12066758 |
Pellicle and pellicle assembly |
David Ferdinand Vles, Aage Bendiksen, Derk Servatius Gertruda Brouns, Pradeep K. Govil, Paul Janssen +9 more |
2024-08-20 |
| 11762281 |
Membrane for EUV lithography |
Maxim Aleksandrovich Nasalevich, Nirupam Banerjee, Michiel Blauw, Derk Servatius Gertruda Brouns, Paul Janssen +17 more |
2023-09-19 |
| 11347142 |
Pellicle and pellicle assembly |
David Ferdinand Vles, Aage Bendiksen, Derk Servatius Gertruda Brouns, Pradeep K. Govil, Paul Janssen +9 more |
2022-05-31 |
| 10983431 |
Pellicle and pellicle assembly |
David Ferdinand Vles, Aage Bendiksen, Derk Servatius Gertruda Brouns, Pradeep K. Govil, Paul Janssen +9 more |
2021-04-20 |
| 10908496 |
Membrane for EUV lithography |
Maxim Aleksandrovich Nasalevich, Nirupam Banerjee, Michiel Blauw, Derk Servatius Gertruda Brouns, Paul Janssen +17 more |
2021-02-02 |
| 10466585 |
Pellicle and pellicle assembly |
David Ferdinand Vles, Aage Bendiksen, Derk Servatius Gertruda Brouns, Pradeep K. Govil, Paul Janssen +9 more |
2019-11-05 |