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Method of manufacturing a pellicle for a lithographic apparatus, a pellicle for a lithographic apparatus, a lithographic apparatus, a device manufacturing method, an apparatus for processing a pellicle, and a method for processing a pellicle |
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| 12117726 |
Pellicle and pellicle assembly |
David Ferdinand Vles, Chaitanya Krishna ANDE, Antonius Franciscus Johannes De Groot, Johannes Joseph Janssen, Paul Janssen +18 more |
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| 12072620 |
Method of manufacturing a membrane assembly |
Pieter-Jan Van Zwol, Sander Baltussen, Dennis De Graaf, Johannes Christiaan Leonardus Franken, Alexander Ludwig KLEIN +11 more |
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| 11971654 |
Metal-silicide-nitridation for stress reduction |
Pieter-Jan Van Zwol, Johan Hendrik Klootwijk, Evgenia KURGANOVA, Maxim Aleksandrovich Nasalevich, Arnoud Willem Notenboom +4 more |
2024-04-30 |
| 11947256 |
Simultaneous double-side coating of multilayer graphene pellicle by local thermal processing |
Evgenia KURGANOVA, Maxim Aleksandrovich Nasalevich, Arnoud Willem Notenboom, Mária Péter, Pieter-Jan Van Zwol +2 more |
2024-04-02 |
| 11754918 |
Pellicle and pellicle assembly |
David Ferdinand Vles, Chaitanya Krishna ANDE, Antonius Franciscus Johannes De Groot, Johannes Joseph Janssen, Paul Janssen +18 more |
2023-09-12 |
| 11686997 |
Metal-silicide-nitridation for stress reduction |
Pieter-Jan Van Zwol, Johan Hendrik Klootwijk, Evgenia KURGANOVA, Maxim Aleksandrovich Nasalevich, Arnoud Willem Notenboom +4 more |
2023-06-27 |
| 11467486 |
Graphene pellicle lithographic apparatus |
Evgenia KURGANOVA, Alexander Ludwig KLEIN, Maxim Aleksandrovich Nasalevich, Arnoud Willem Notenboom, Mária Péter +4 more |
2022-10-11 |
| 11287737 |
Metal-silicide-nitridation for stress reduction |
Pieter-Jan Van Zwol, Johan Hendrik Klootwijk, Evgenia KURGANOVA, Maxim Aleksandrovich Nasalevich, Arnoud Willem Notenboom +4 more |
2022-03-29 |
| 11231646 |
Pellicle and pellicle assembly |
David Ferdinand Vles, Chaitanya Krishna ANDE, Antonius Franciscus Johannes De Groot, Johannes Joseph Janssen, Paul Janssen +18 more |
2022-01-25 |
| 11090860 |
3D printing of graphene (oxide) composites |
Johan Hendrik Klootwijk, Abraham Rudolf Balkenende, Elise Claude Valentine Talgorn |
2021-08-17 |