Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12072620 | Method of manufacturing a membrane assembly | Pieter-Jan Van Zwol, Dennis De Graaf, Johannes Christiaan Leonardus Franken, Adrianus Johannes Maria Giesbers, Alexander Ludwig KLEIN +11 more | 2024-08-27 |
| 11703768 | Lithographic apparatus and related methods | Alisia Mariska Willems-Peters, Zhuangxiong HUANG, Reinier Theodorus Martinus Jilisen, Sietse Wijtvliet | 2023-07-18 |
| 10222701 | Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method | Chuangxin Zhao, Pär Mårten Lukas Broman, Richard Joseph Bruls, Cristian Bogdan Craus, Jan Groenewold +4 more | 2019-03-05 |
| 8857465 | Method and system for realizing a vacuum in a vacuum chamber | — | 2014-10-14 |
| 8690005 | Charged particle lithography apparatus and method of generating vacuum in a vacuum chamber | Guido De Boer, Tijs Frans Teepen, Hugo Martijn Makkink | 2014-04-08 |
| 8366423 | Method and arrangement for realizing a vacuum in a vacuum chamber | — | 2013-02-05 |