Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10222701 | Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method | Sander Baltussen, Pär Mårten Lukas Broman, Richard Joseph Bruls, Cristian Bogdan Craus, Jan Groenewold +4 more | 2019-03-05 |
| 10042260 | Device for monitoring a radiation source, radiation source, method of monitoring a radiation source, device manufacturing method | Erik Willem Bogaart | 2018-08-07 |