Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8690005 | Charged particle lithography apparatus and method of generating vacuum in a vacuum chamber | Sander Baltussen, Guido De Boer, Tijs Frans Teepen | 2014-04-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8690005 | Charged particle lithography apparatus and method of generating vacuum in a vacuum chamber | Sander Baltussen, Guido De Boer, Tijs Frans Teepen | 2014-04-08 |