Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE49602 | Lithography system, sensor and measuring method | Pieter Kruit, Erwin Slot, Marco Jan-Jaco Wieland, Stijn Willem Herman Karel Steenbrink | 2023-08-08 |
| RE48046 | Lithography system, sensor and measuring method | Pieter Kruit, Erwin Slot, Marco Jan-Jaco Wieland, Stijn Willem Herman Karel Steenbrink | 2020-06-09 |
| RE45206 | Lithography system, sensor and measuring method | Pieter Kruit, Erwin Slot, Marco Jan-Jaco Wieland, Stijin Willem Herman Karel Steenbrink | 2014-10-28 |
| 8690005 | Charged particle lithography apparatus and method of generating vacuum in a vacuum chamber | Sander Baltussen, Guido De Boer, Hugo Martijn Makkink | 2014-04-08 |
| 7868300 | Lithography system, sensor and measuring method | Pieter Kruit, Erwin Slot, Marco Jan-Jaco Wieland, Stijn Willem Herman Karel Steenbrink | 2011-01-11 |