Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10690812 | Optical element and optical system for EUV lithography, and method for treating such an optical element | Hermanus Hendricus Petrus Theodorus Bekman, Dirk Heinrich Ehm, Jeroen Huijbregtse, Arnoldus Jan Storm, Tina Graber +3 more | 2020-06-23 |
| 9823576 | Radiation modulator for a lithography apparatus, a lithography apparatus, a method of modulating radiation for use in lithography, and a device manufacturing method | Arno Jan Bleeker, Christopher J. Lee, Pieter Willem Herman De Jager, Heine Melle Mulder, Rudy Jan Maria Pellens | 2017-11-21 |
| 9715183 | Device, lithographic apparatus, method for guiding radiation and device manufacturing method | Wouter Dick KOEK, Arno Jan Bleeker, Erik Roelof Loopstra, Heine Melle Mulder, Erwin John Van Zwet +1 more | 2017-07-25 |