Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10690812 | Optical element and optical system for EUV lithography, and method for treating such an optical element | Hermanus Hendricus Petrus Theodorus Bekman, Dirk Heinrich Ehm, Jeroen Huijbregtse, Tina Graber, Irene Ament +3 more | 2020-06-23 |
| 8477285 | Particle cleaning of optical elements for microlithography | Dirk Heinrich Ehm, Johannes Hubertus Josephina Moors, Almut Czap, Mona Nagel, Jacques Cor Johan Van Der Donck +4 more | 2013-07-02 |
| 7959310 | Optical arrangement and EUV lithography device with at least one heated optical element, operating methods, and methods for cleaning as well as for providing an optical element | Dirk Heinrich Ehm, Annemieke Van De Runstraat, Bastiaan Theodoor Wolschrijn, Thomas Stein, Marco G. H. Meijerink +8 more | 2011-06-14 |