Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774861 | Calibration method for a lithographic system | Chung-Hsun Li | 2023-10-03 |
| 11347152 | Scan signal characterization diagnostics | Krishanu SHOME | 2022-05-31 |
| 10459354 | Lithographic apparatus and lithographic projection method | Kevin VAN DE RUIT, Bart Dinand Paarhuis, Jean-Philippe Xavier Van Damme, Johannes Onvlee | 2019-10-29 |