Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12032301 | Substrate support, lithographic apparatus and loading method | Johannes Onvlee, Antonius Franciscus Johannes De Groot, David Ferdinand Vles | 2024-07-09 |
| 11556063 | Substrate support, lithographic apparatus and loading method | Johannes Onvlee, Antonius Franciscus Johannes De Groot, David Ferdinand Vles | 2023-01-17 |
| 10416572 | Positioning system, method to position, lithographic apparatus and device manufacturing method | Hans Butler, Bas JANSEN | 2019-09-17 |
| 8682555 | Method for controlling a torque transmitting device with learning function | Gregory Pinte, Walter Verdonck, Mark R. J. Versteyhe, Maarten Maurits Van Speybroeck, Jan Swevers +1 more | 2014-03-25 |