Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7933000 | Device manufacturing method, method for holding a patterning device and lithographic apparatus including an applicator for applying molecules onto a clamp area of a patterning device | Dirk-Jan Bijvoet | 2011-04-26 |
| 7817241 | Lithographic apparatus and device manufacturing method | Suzan Leonie Auer-Jongepier, Norbertus Josephus Martinus Van Den Nieuwelaar | 2010-10-19 |
| 7756597 | Method of operating a lithographic processing machine, control system, lithographic apparatus, lithographic processing cell, and computer program | Norbertus Josephus Martinus Van Den Nieuwelaar, Willem Herman Gertruda Anna Koenen, Henricus Petrus Van Lierop, Robert Dumont, Jacobus Rooda +1 more | 2010-07-13 |
| 7714981 | Lithographic apparatus and method | Erik Roelof Loopstra | 2010-05-11 |
| 7679714 | Lithographic apparatus, combination of lithographic apparatus and processing module, and device manufacturing method | Reinder Teun Plug, Hubert Marie Segers, David Christopher Ockwell, Paul Jacques Van Wijnen, Suzan Leonie Auer-Jongepier | 2010-03-16 |
| 7633600 | Lithographic apparatus and device manufacturing method | Dirk-Jan Bijvoet | 2009-12-15 |
| 7630118 | Spatial light modulator, method of spatially modulating a radiation beam, lithographic apparatus and device manufacturing method | — | 2009-12-08 |
| 7511797 | Lithography system, control system and device manufacturing method | Franciscus Van De Mast, Johan Christiaan Gerard Hoefnagels, Reinder Teun Plug | 2009-03-31 |
| 7433033 | Inspection method and apparatus using same | Arno Jan Bleeker, Vadim Yevgenyevich Banine, Jacques Cor Johan Van Der Donck, Michiel Peter Oderwald | 2008-10-07 |
| 7352439 | Lithography system, control system and device manufacturing method | Franciscus Van De Mast, Johan Christiaan Gerard Hoefnagels, Reinder Teun Plug | 2008-04-01 |
| 7349082 | Particle detection device, lithographic apparatus and device manufacturing method | Peter Greve, Johannes Hendrikus Gertrudis Franssen | 2008-03-25 |
| 7283225 | Particle detection device, lithographic apparatus and device manufacturing method | Raimond Visser, Peter Greve, Johannes Hendrikus Gertrudis Franssen, Erwin Theodorus Jacoba Verhagen | 2007-10-16 |
| 7195407 | Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing, cell and computer program | Norbertus Josephus Martinus Van Den Nieuwelaar, Roel Boumen | 2007-03-27 |
| 7184849 | Method of planning tasks in a machine, method of controlling a machine, supervisory machine control system, lithographic apparatus, lithographic processing cell and computer program | Norbertus Josephus Martinus Van Den Nieuwelaar, Roel Boumen, Henricus Petrus Van Lierop, Robert Dumont, Jacobus Rooda | 2007-02-27 |
| 7123349 | Lithographic projection assembly, substrate handling apparatus and substrate handling method | Pieter Johannes Marius Van Groos, Pieter Renaat Maria Hennus, Jan Frederik Hoogkamp, Albert Jan Hendrik Klomp, Raimond Visser | 2006-10-17 |
| 7068351 | Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing cell, and computer program | Norbertus Josephus Martinus Van Den Nieuwelaar, Roel Boumen | 2006-06-27 |
| 5452408 | Method of assigning a pertinent indication in respect of color behavior to a picture element to be imaged with a color reproduction system | Jacob A. Westdijk, Jacobus H. M. Schonenberg, Monique G. M. Sommer | 1995-09-19 |