Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7195407 | Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing, cell and computer program | Norbertus Josephus Martinus Van Den Nieuwelaar, Johannes Onvlee | 2007-03-27 |
| 7184849 | Method of planning tasks in a machine, method of controlling a machine, supervisory machine control system, lithographic apparatus, lithographic processing cell and computer program | Norbertus Josephus Martinus Van Den Nieuwelaar, Johannes Onvlee, Henricus Petrus Van Lierop, Robert Dumont, Jacobus Rooda | 2007-02-27 |
| 7068351 | Method of controlling a lithographic processing cell, device manufacturing method, lithographic apparatus, track unit, lithographic processing cell, and computer program | Norbertus Josephus Martinus Van Den Nieuwelaar, Johannes Onvlee | 2006-06-27 |