Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7283225 | Particle detection device, lithographic apparatus and device manufacturing method | Johannes Onvlee, Raimond Visser, Peter Greve, Johannes Hendrikus Gertrudis Franssen | 2007-10-16 |