Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8502954 | Lithographic apparatus and device manufacturing method | Gustaaf Willem Van Der Feltz, Cheng-Qun Gui | 2013-08-06 |
| 7561251 | Lithographic apparatus and device manufacturing method | Gustaaf Willem Van Der Feltz, Cheng-Qun Gui | 2009-07-14 |
| 7538855 | Lithographic apparatus and device manufacturing method | Kars Zeger Troost, Pieter Willem Herman De Jager | 2009-05-26 |
| 7511797 | Lithography system, control system and device manufacturing method | Franciscus Van De Mast, Johannes Onvlee, Reinder Teun Plug | 2009-03-31 |
| 7477403 | Optical position assessment apparatus and method | Cheng-Qun Gui, Fransiscus Godefridus Casper Bijnen, Pieter Willem Herman De Jager, Joannes Theodoor De Smit | 2009-01-13 |
| 7352439 | Lithography system, control system and device manufacturing method | Franciscus Van De Mast, Johannes Onvlee, Reinder Teun Plug | 2008-04-01 |
| 7116398 | Lithographic apparatus and device manufacturing method | Peter Spit | 2006-10-03 |