| 11378893 |
Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more |
2022-07-05 |
| 10838310 |
Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more |
2020-11-17 |
| 10268128 |
Lithographic apparatus |
Franciscus Johannes Joseph Janssen, Johannes Paul Marie De La Rosette, Edwin Cornelis Kadijk, Nicolas Lallemant, Jan Liefooghe +4 more |
2019-04-23 |
| 10254663 |
Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Van Meer +20 more |
2019-04-09 |
| 9606445 |
Lithographic apparatus and method of manufacturing a device |
Vadim Yevgenyevich Banine, Arthur Winfried Eduardus Minnaert, Andrei Mikhailovich Yakunin, Luigi Scaccabarozzi, Hans Joerg Mallmann +8 more |
2017-03-28 |
| 9268242 |
Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more |
2016-02-23 |
| 9188880 |
Lithographic apparatus and device manufacturing method involving a heater |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more |
2015-11-17 |
| 9176398 |
Method and system for thermally conditioning an optical element |
Roger W. Schmitz, Tjarko Adriaan Rudolf Van Empel, Lun Kai Cheng, Franciscus Johannes Joseph Janssen, Willem Arie Van Helden +9 more |
2015-11-03 |
| 7804575 |
Lithographic apparatus and device manufacturing method having liquid evaporation control |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more |
2010-09-28 |
| 7542127 |
Lithographic apparatus and method for manufacturing a device |
Timotheus Franciscus Sengers, Nicolaas Antonius Allegondus Johannes Van Asten, Wilhelmus Josephus Box, Tjarko Adriaan Rudolf Van Empel, Leon Martin Levasier +6 more |
2009-06-02 |
| 7342237 |
Lithographic apparatus and device manufacturing method |
Ronald Walther Jeanne Severijns, Sonia Margart Skelly, Theodorus Petrus Maria Cadee |
2008-03-11 |
| 6509951 |
Lithographic projection apparatus having a temperature controlled heat shield |
Erik Roelof Loopstra, Yim-Bun Patrick Kwan, Sonja T. De Vrieze-Voorn |
2003-01-21 |