Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9268242 | Lithographic apparatus and device manufacturing method involving a heater and a temperature sensor | Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens +20 more | 2016-02-23 |
| 9188880 | Lithographic apparatus and device manufacturing method involving a heater | Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens +20 more | 2015-11-17 |
| 7804575 | Lithographic apparatus and device manufacturing method having liquid evaporation control | Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens +20 more | 2010-09-28 |