Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7465943 | Controlling the flow through the collector during cleaning | Vadim Yevgenyevich Banine, Derk Jan Wilfred Klunder, Maarten Marinus Johannes Wilhelmus Van Herpen | 2008-12-16 |
| 7342237 | Lithographic apparatus and device manufacturing method | Ronald Walther Jeanne Severijns, Marcel Johannus Elisabeth Hubertus Muitjens, Theodorus Petrus Maria Cadee | 2008-03-11 |