Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774865 | Method of controlling a position of a first object relative to a second object, control unit, lithographic apparatus and apparatus | Thijs Adriaan Cornelis Van Keulen, Hendrikus Herman Marie Cox, Willem Herman Gertruda Anna Koenen | 2023-10-03 |
| 10120293 | Object positioning in lithography | Hans Butler, Yanin Kasemsinsup | 2018-11-06 |
| 9927721 | Object positioning system, control system, lithographic apparatus, object positioning method and device manufacturing method | Hans Butler, Wilhelmus Henricus Theodorus Maria Aangenent, Nic Jasper Dirkx, Wilhelmus Franciscus Johannes Simons | 2018-03-27 |
| 9715182 | Lithographic apparatus, substrate support system, device manufacturing method and control program | Marinus Maria Johannes Van De Wal, Wilhelmus Henricus Theodorus Maria Aangenent, Khalid Manssouri | 2017-07-25 |
| 8928860 | Lithographic apparatus having a chuck with a visco-elastic damping layer | Peter Paul HEMPENIUS, Dirk-Jan Bijvoet, Youssef Karel Maria De Vos | 2015-01-06 |
| 8854607 | Controller, lithographic apparatus, method of controlling the position of an object and device manufacturing method | Hans Butler, Martijn Houkes, Marinus Maria Johannes Van De Wal, Jeroen Johan Maarten Van De Wijdeven | 2014-10-07 |
| 8830442 | Servo control system, lithographic apparatus and control method | Youssef Karel Maria De Vos, Dirk-Jan Bijvoet, Ronald Casper Kunst, Khalid Manssouri | 2014-09-09 |
| 8279407 | Stage system and lithographic apparatus comprising such stage system | Henrikus Herman Marie Cox, Emiel Jozef Melanie Eussen, Ronald Casper Kunst, Engelbertus Antonius Fransiscus Van Der Pasch, Marcel François Heertjes +1 more | 2012-10-02 |
| 8014881 | Lithographic apparatus and device manufacturing method | Mark Constant Johannes Baggen, Petrus Marinus Christianus Maria Van Den Biggelaar, Yin Tim Tso, Marcel François Heertjes, Dennis Andreas Petrus Hubertina Houben +2 more | 2011-09-06 |
| 7782446 | Stage system and lithographic apparatus comprising such stage system | Henrikus Herman Marie Cox, Ronald Casper Kunst, Youssef Karel Maria De Vos | 2010-08-24 |
| 7657334 | Lithographic apparatus and control method | Youssef Karel Maria De Vos, Ronald Casper Kunst, Yin Tim Tso | 2010-02-02 |
| 7576832 | Lithographic apparatus and device manufacturing method | Yin Tim Tso, Rob Tousain | 2009-08-18 |
| 7453228 | Method for controlling a positioning device, positioning device, and lithographic apparatus provided with a positioning device | Marcel François Heertjes, Yin Tim Tso, Dennis Andreas Petrus Hubertina Houben | 2008-11-18 |