Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7576832 | Lithographic apparatus and device manufacturing method | Ramidin Izair Kamidi, Yin Tim Tso | 2009-08-18 |
| 7170581 | Self-adapting feedforward control tuning for motion system, and lithographic apparatus provided with such a motion system | — | 2007-01-30 |
| 6163429 | Learning to compensate for randomly occurring shocks | Jean-Christophe Boissy | 2000-12-19 |