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E-beam apparatus |
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Electron beam inspection apparatus stage positioning |
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E-beam apparatus |
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| 10809634 |
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| 10191396 |
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System for positioning an object in lithography |
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Lithographic apparatus with actuator to compensate acoustic vibration |
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Lithographic apparatus having a chuck with a visco-elastic damping layer |
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| 8310651 |
Lithographic apparatus, method and device manufacturing method |
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Lithographic apparatus and device manufacturing method |
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2011-06-28 |
| 7884919 |
Lithographic apparatus and device manufacturing method |
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2011-02-08 |
| 7742149 |
Stage system and lithographic apparatus comprising such a stage system |
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2010-06-22 |