| 12028000 |
Object table comprising an electrostatic clamp |
Jan-Gerard Cornelis Van Der Toorn, Jeroen Gertruda Antonius HUINCK, Han Willem Hendrik SEVERT, Michaël Johannes Christiaan RONDE, Arno Maria WELLINK +6 more |
2024-07-02 |
| 11908656 |
Stage apparatus suitable for a particle beam apparatus |
Han Willem Hendrik SEVERT, Jan-Gerard Cornelis Van Der Toorn, Ronald Van Der Wilk |
2024-02-20 |
| 11764030 |
Stage apparatus suitable for electron beam inspection apparatus |
Johannes Hubertus Antonius Van De Rijdt, Peter Paul HEMPENIUS, Jef GOOSSENS, Petrus Wilhelmus Vleeshouwers |
2023-09-19 |
| 11637512 |
Object table comprising an electrostatic clamp |
Jan-Gerard Cornelis Van Der Toorn, Jeroen Gertruda Antonius HUINCK, Han Willem Hendrik SEVERT, Michaël Johannes Christiaan RONDE, Arno Maria WELLINK +6 more |
2023-04-25 |
| 10768025 |
Encoder, position measurement system and lithographic apparatus involving an enclosing device |
Wouter Onno Pril, Jan P. Baartman, Suzanne Johanna Antonetta Geertruda Cosijns, Bryan Tong-Minh |
2020-09-08 |
| 9971254 |
Sensor, lithographic apparatus and device manufacturing method |
Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Haico Victor Kok, Yuri Johannes Gabriël Van De Vijver, Johannes Antonius Maria Van De Wal +6 more |
2018-05-15 |
| 9753382 |
Sensor, lithographic apparatus and device manufacturing method |
Thibault Simon Mathieu Laurent, Johannes Henricus Wilhelmus Jacobs, Haico Victor Kok, Yuri Johannes Gabriël Van De Vijver, Johannes Antonius Maria Van De Wal +6 more |
2017-09-05 |
| 9081309 |
Detector module, cooling arrangement and lithographic apparatus comprising a detector module |
Bastiaan Andreas Wilhelmus Hubertus Knarren, Raymond Turk |
2015-07-14 |
| 8817228 |
Cooling arrangement and lithographic apparatus comprising a resilient wall creating a gap between a detector module housing and a heat sink of the cooling arrangement |
Bastiaan Andreas Wilhelmus Hubertus Knarren, Raymond Turk, Nico Antonius Johannes Hubertus Boonen |
2014-08-26 |