Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12028000 | Object table comprising an electrostatic clamp | Jan-Gerard Cornelis Van Der Toorn, Han Willem Hendrik SEVERT, Allard Eelco Kooiker, Michaël Johannes Christiaan RONDE, Arno Maria WELLINK +6 more | 2024-07-02 |
| 11637512 | Object table comprising an electrostatic clamp | Jan-Gerard Cornelis Van Der Toorn, Han Willem Hendrik SEVERT, Allard Eelco Kooiker, Michaël Johannes Christiaan RONDE, Arno Maria WELLINK +6 more | 2023-04-25 |
| 9852937 | Object table, lithographic apparatus and device manufacturing method | — | 2017-12-26 |