Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9378722 | Lithographic apparatus with actuator to compensate acoustic vibration | Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Johan Geerke, Peter Paul HEMPENIUS, Youssef Karel Maria De Vos +5 more | 2016-06-28 |
| 8553199 | Lithographic apparatus and device manufacturing method | Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Johan Geerke, Joost De Pee, Marco Hendrikus Hermanus Oude Nijhuis +1 more | 2013-10-08 |
| 8243258 | Lithographic apparatus having acoustic resonator | Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Johan Geerke, Joost De Pee, Marco Hendrikus Hermanus Oude Nijhuis +1 more | 2012-08-14 |
| 7969550 | Lithographic apparatus and device manufacturing method | Johan Geerke, Peter Paul HEMPENIUS, Youssef Karel Maria De Vos | 2011-06-28 |