| 10545414 |
Vibration isolation system and lithographic apparatus |
Alexander Petrus Josephus Van Lankvelt, Ingmar August Kerp, Richardus Simon Antonius Oostveen, Robertus Mathijs Gerardus Rijs, Olav Johannes Seijger +1 more |
2020-01-28 |
| 9696630 |
Lithographic apparatus and device manufacturing method |
Marc Wilhelmus Maria Van Der Wijst, Hans Butler, Erik Roelof Loopstra, Bernhard Geuppert, Rodolfo Guglielmi Rabe +2 more |
2017-07-04 |
| 9378722 |
Lithographic apparatus with actuator to compensate acoustic vibration |
Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Johan Geerke, Peter Paul HEMPENIUS, Youssef Karel Maria De Vos +5 more |
2016-06-28 |
| 9134632 |
Lithographic apparatus and device manufacturing method |
Marc Wilhelmus Maria Van Der Wijst, Hans Butler, Yim-Bun Patrick Kwan, Erik Roelof Loopstra, Bernhard Geuppert +2 more |
2015-09-15 |
| 8730451 |
Lithographic apparatus for transferring pattern from patterning device onto substrate, and damping method |
Hans Butler |
2014-05-20 |
| 8553199 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Johan Geerke, Joost De Pee, Clementius Andreas Johannes Beijers +1 more |
2013-10-08 |
| 8243258 |
Lithographic apparatus having acoustic resonator |
Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Johan Geerke, Joost De Pee, Clementius Andreas Johannes Beijers +1 more |
2012-08-14 |