Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10782620 | Vibration isolation device, lithographic apparatus and method to tune a vibration isolation device | Alexander Petrus Josephus Van Lankvelt | 2020-09-22 |
| 10545414 | Vibration isolation system and lithographic apparatus | Alexander Petrus Josephus Van Lankvelt, Ingmar August Kerp, Richardus Simon Antonius Oostveen, Marco Hendrikus Hermanus Oude Nijhuis, Robertus Mathijs Gerardus Rijs +1 more | 2020-01-28 |
| 8922755 | Support structure, inspection apparatus, lithographic apparatus and methods for loading and unloading substrates | Martinus Joseph Kok, Sander Kerssemakers | 2014-12-30 |
| 8836190 | Magnetic bearing, a rotary stage, and a reflective electron beam lithography apparatus | Sahin Funda, Krijn Frederik Bustraan, Justus Post | 2014-09-16 |
| 8797509 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Martinus Joseph Kok, Sander Kerssemakers, Mark Johannes Magielsen | 2014-08-05 |
| 8773640 | Inspection method and apparatus | Martinus Joseph Kok, Sander Kerssemakers, Mark Johannes Magielsen | 2014-07-08 |
| 6742244 | Device for placing components on a carrier | Johannes Hubertus Antonius Van De Rijdt, Leonardus C. M. Sanders, Hermanus M. J. R. Soemers | 2004-06-01 |