Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392391 | Vibration isolator for supporting a payload | Galip Tuna TURKBEY, Hubertus Renier Maria Van Lierop, Erik Roelof Loopstra, Ahmet Levent Avsar | 2025-08-19 |
| 10782620 | Vibration isolation device, lithographic apparatus and method to tune a vibration isolation device | Olav Johannes Seijger | 2020-09-22 |
| 10545414 | Vibration isolation system and lithographic apparatus | Ingmar August Kerp, Richardus Simon Antonius Oostveen, Marco Hendrikus Hermanus Oude Nijhuis, Robertus Mathijs Gerardus Rijs, Olav Johannes Seijger +1 more | 2020-01-28 |