Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10101677 | Inspection apparatus for measuring properties of a target structure, methods of operating an optical system, method of manufacturing devices | Kim Gerard Feijen, Henricus Wilhelmus Maria Van Buel | 2018-10-16 |
| 8922755 | Support structure, inspection apparatus, lithographic apparatus and methods for loading and unloading substrates | Olav Johannes Seijger, Sander Kerssemakers | 2014-12-30 |
| 8797509 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Olav Johannes Seijger, Sander Kerssemakers, Mark Johannes Magielsen | 2014-08-05 |
| 8773640 | Inspection method and apparatus | Olav Johannes Seijger, Sander Kerssemakers, Mark Johannes Magielsen | 2014-07-08 |
| 7999940 | Apparatus for angular-resolved spectroscopic lithography characterization | — | 2011-08-16 |
| 7999943 | Device manufacturing method with angular-resolved spectroscopic lithography characterization | — | 2011-08-16 |
| 7659988 | Apparatus for angular-resolved spectroscopic lithography characterization and device manufacturing method | Reinder Teun Plug, Sander Kerssemakers | 2010-02-09 |