| 10466595 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2019-11-05 |
| 9798246 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2017-10-24 |
| 9766558 |
Lithographic apparatus with flexible transportation line having varying stiffness between two objects |
Tjarko Adriaan Rudolf Van Empel, Norbert Erwin Therenzo Jansen |
2017-09-19 |
| 9477160 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2016-10-25 |
| 8964164 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2015-02-24 |
| 8854607 |
Controller, lithographic apparatus, method of controlling the position of an object and device manufacturing method |
Ramidin Izair Kamidi, Hans Butler, Marinus Maria Johannes Van De Wal, Jeroen Johan Maarten Van De Wijdeven |
2014-10-07 |
| 8724084 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2014-05-13 |
| 8724083 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2014-05-13 |
| 7936444 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more |
2011-05-03 |
| 7859644 |
Lithographic apparatus, immersion projection apparatus and device manufacturing method |
Jan-Gerard Cornelis Van Der Toorn, Hans Butler, Henrikus Herman Marie Cox, Evert Hendrik Jan Draaijer, Nicolaas Ten Kate +4 more |
2010-12-28 |
| 7630059 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Jan-Gerard Cornelis Van Der Toorn, Wilhelmus Franciscus Johannes Simons |
2009-12-08 |
| 7352434 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Levinus Pieter Bakker, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen +12 more |
2008-04-01 |
| 7330238 |
Lithographic apparatus, immersion projection apparatus and device manufacturing method |
Jan-Gerard Cornelis Van Der Toorn, Hans Butler, Henrikus Herman Marie Cox, Evert Hendrik Jan Draaijer, Nicolaas Ten Kate +4 more |
2008-02-12 |
| 7265813 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Henrikus Herman Marie Cox |
2007-09-04 |
| 7170583 |
Lithographic apparatus immersion damage control |
Frits Van Der Meulen, Henrikus Herman Marie Cox, Robertus Johannes Van Vliet, Stoyan Nihtianov, Petrus Wilhelmus Josephus Maria Kemper +1 more |
2007-01-30 |
| 7148950 |
Lithographic apparatus and device manufacturing method |
Evert Hendrik Jan Draaijer, Martinus Agnes Willem Cuijpers, Menno Fien, Marcus Joseph Elisabeth Godfried Breukers, Edwin Teunis Van Donkelaar |
2006-12-12 |
| 7005823 |
Positioning system and positioning method |
Henrikus Herman Marie Cox, Ramidin Izair Kamidin, Patricia Vreugdewater |
2006-02-28 |