Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10175587 | Lithographic apparatus and device manufacturing method | Hans Butler, Marcel François Heertjes | 2019-01-08 |
| 8891063 | Lithographic apparatus and device manufacturing method | Marcel François Heertjes, Niels Johannes Maria Bosch | 2014-11-18 |
| 7352436 | Lithographic apparatus, projection apparatus and device manufacturing method | Hans Butler, Evert Hendrik Jan Draaijer | 2008-04-01 |
| 7148950 | Lithographic apparatus and device manufacturing method | Evert Hendrik Jan Draaijer, Martinus Agnes Willem Cuijpers, Menno Fien, Martijn Houkes, Edwin Teunis Van Donkelaar | 2006-12-12 |