Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8426831 | Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector | Stoyan Nihtianov, Arie Johan Van Der Sijs, Bearrach Moest, Marc Antonius Maria Haast, Gerardus Wilhelmus Petrus Baas +6 more | 2013-04-23 |
| 8138485 | Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector | Stoyan Nihtianov, Arie Johan Van Der Sijs, Bearrach Moest, Marc Antonius Maria Haast, Gerardus Wilhelmus Petrus Baas +6 more | 2012-03-20 |
| 7586108 | Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector | Stoyan Nihtianov, Arie Johan Van Der Sijs, Bearrach Moest, Marc Antonius Maria Haast, Gerardus Wilhelmus Petrus Baas +6 more | 2009-09-08 |
| 7321416 | Lithographic apparatus, device manufacturing method, device manufactured thereby, and controllable patterning device utilizing a spatial light modulator with distributed digital to analog conversion | Martinus Cornelis Reijnen, Andrej Makarovic, Lambertus Gerardus Maria Kessels, Stoyan Nihtianov, Kamen Hristov Chilov | 2008-01-22 |
| 7190437 | Wireless signaling in a lithographic apparatus | Hans Butler, Stoyan Nihtianov | 2007-03-13 |
| 7170583 | Lithographic apparatus immersion damage control | Frits Van Der Meulen, Henrikus Herman Marie Cox, Martijn Houkes, Robertus Johannes Van Vliet, Stoyan Nihtianov +1 more | 2007-01-30 |