Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11828344 | Support, vibration isolation system, lithographic apparatus, object measurement apparatus, device manufacturing method | Johannes Petrus Martinus Bernardus Vermeulen, Jeroen Pieter Starreveld, Stan Henricus Van Der Meulen | 2023-11-28 |
| 10185224 | Method and apparatus for inspection and metrology | Ferry Zijp, Duygu Akbulut, Peter Danny Van Voorst, Koos Van Berkel | 2019-01-22 |
| 9927722 | Method and apparatus for inspection and metrology | Koos Van Berkel, Duygu Akbulut, Ferry Zijp | 2018-03-27 |
| 9811001 | Method and apparatus for inspection and metrology | Peter Danny Van Voorst, Duygu Akbulut, Koos Van Berkel, Ferry Zijp | 2017-11-07 |
| 8854607 | Controller, lithographic apparatus, method of controlling the position of an object and device manufacturing method | Ramidin Izair Kamidi, Hans Butler, Martijn Houkes, Marinus Maria Johannes Van De Wal | 2014-10-07 |