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Method for thermo-mechanical control of a heat sensitive element and device for use in a lithographic production process |
Victor Sebastiaan Dolk, Mauritius Gerardus Elisabeth Schneiders |
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Method and apparatus for calculating a spatial map associated with a component |
Mauritius Gerardus Elisabeth Schneiders, Wenjie JIN |
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Object holder, electrostatic sheet and method for making an electrostatic sheet |
Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Marcus Adrianus Van De Kerkhof, Roger Franciscus Mattheus Maria Hamelinck, Shahab Shervin, Marinus Augustinus Christiaan Verschuren +7 more |
2025-02-25 |
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Object holder, tool and method of manufacturing an object holder |
Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Johannes Bernardus Charles ENGELEN, Arnoud Willem Notenboom, Jim Vincent Overkamp, Kjeld Gertrudus Hendrikus Janssen +3 more |
2025-01-14 |
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Multilayer reflector, method of manufacturing a multilayer reflector and lithographic apparatus |
Adrianus Hendrik Koevoets |
2021-03-23 |
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Lithographic apparatus |
Frits Van Der Meulen, Erik Johan Arlemark, Hendrikus Herman Marie Cox, Martinus Agnes Willem Cuijpers, Joost DE HOOGH +17 more |
2020-08-18 |
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Method of determining a property of a structure, inspection apparatus and device manufacturing method |
Sietse Thijmen Van Der Post |
2020-07-14 |
| 10488765 |
Method of optimizing the position and/or size of a measurement illumination spot relative to a target on a substrate, and associated apparatus |
Johan Maria Van Boxmeer, Marinus Johannes Maria Van Dam, Sietse Thijmen Van Der Post, Johannes Hubertus Antonius Van De Rijdt |
2019-11-26 |
| 10185224 |
Method and apparatus for inspection and metrology |
Ferry Zijp, Duygu Akbulut, Peter Danny Van Voorst, Jeroen Johan Maarten Van De Wijdeven |
2019-01-22 |
| 9927722 |
Method and apparatus for inspection and metrology |
Duygu Akbulut, Jeroen Johan Maarten Van De Wijdeven, Ferry Zijp |
2018-03-27 |
| 9811001 |
Method and apparatus for inspection and metrology |
Peter Danny Van Voorst, Duygu Akbulut, Jeroen Johan Maarten Van De Wijdeven, Ferry Zijp |
2017-11-07 |