Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774865 | Method of controlling a position of a first object relative to a second object, control unit, lithographic apparatus and apparatus | Thijs Adriaan Cornelis Van Keulen, Ramidin Izair Kamidi, Willem Herman Gertruda Anna Koenen | 2023-10-03 |
| 10962890 | Positioning device, lithographic apparatus, method for compensating a balance mass torque and device manufacturing method | Wilhelmus Franciscus Johannes Simons, Dave Braaksma, Hans Butler, René Wilhelmus Antonius Hubertus LEENAARS, Stephan Christiaan Quintus Libourel +2 more | 2021-03-30 |
| 10955759 | Lithographic apparatus and device manufacturing method | Olof Martinus Josephus Fischer | 2021-03-23 |
| 10747127 | Lithographic apparatus | Frits Van Der Meulen, Erik Johan Arlemark, Martinus Agnes Willem Cuijpers, Joost DE HOOGH, Gosse Charles De Vries +17 more | 2020-08-18 |
| 10620552 | Stage system, lithographic apparatus and device manufacturing method | Ronald Cornelis Gerardus Gijzen, Patrick Willem Paul Limpens, Bart Friso Riedstra, Frits Van Der Meulen | 2020-04-14 |
| 10394140 | Lithographic apparatus | Paul Corné Henri DE WIT, Arie Jeffrey Den Boef, Adrianus Hendrik Koevoets, Jim Vincent Overkamp, Frits Van Der Meulen +1 more | 2019-08-27 |
| 10114299 | Lithographic apparatus | Günes NAKIBOGLU, Mark Constant Johannes Baggen, Gerard Johannes Boogaard, Nicolaas Rudolf Kemper, Sander Kerssemakers +6 more | 2018-10-30 |
| 6788386 | Lithographic apparatus and device manufacturing method | Frank Auer, Marc Wilhelmus Maria Van Der Wijst, Bastiaan Stephanus Hendricus Jansen, Dominicus Jacobus Petrus Adrianus Franken | 2004-09-07 |
| 5264982 | Electromagnetic support with unilateral control currents | Jan Van Eijk | 1993-11-23 |
| 5243491 | Electromagnetic support with current-independent characteristics | Jan Van Eijk, Henricus E. Beekman | 1993-09-07 |
| 5227948 | Electromagnetic support with position-independent characteristics | Fidelus Adrianus Boon | 1993-07-13 |
| 5172160 | Optical lithographic device having a machine frame with force compensation | Jan Van Eijk, Gerard Van Engelen, Henricus E. Beekman, Fransiscus Mathijs Jacobs | 1992-12-15 |