Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11837931 | Multiphase linear motor, multiphase planar motor, stage, lithographic apparatus and device manufacturing method | Maarten Hartger Kimman, Peter Michel Silvester Maria Heijmans, Christiaan Alexander Hoogendam | 2023-12-05 |
| 11303175 | Multiphase linear motor, multiphase planar motor, stage, lithographic apparatus and device manufacturing method | Maarten Hartger Kimman, Peter Michel Silvester Maria Heijmans, Christiaan Alexander Hoogendam | 2022-04-12 |
| 10962890 | Positioning device, lithographic apparatus, method for compensating a balance mass torque and device manufacturing method | Wilhelmus Franciscus Johannes Simons, Hans Butler, Hendrikus Herman Marie Cox, René Wilhelmus Antonius Hubertus LEENAARS, Stephan Christiaan Quintus Libourel +2 more | 2021-03-30 |