Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10962890 | Positioning device, lithographic apparatus, method for compensating a balance mass torque and device manufacturing method | Wilhelmus Franciscus Johannes Simons, Dave Braaksma, Hans Butler, Hendrikus Herman Marie Cox, René Wilhelmus Antonius Hubertus LEENAARS +2 more | 2021-03-30 |
| 8848169 | Lithographic apparatus, composite material and manufacturing method | Mark Scholten, Jacob Kleijn, Mark Petrus Ubbink | 2014-09-30 |