| 10816910 |
Vibration isolator, lithographic apparatus and device manufacturing method |
Hans Butler, Cornelius Adrianus Lambertus De Hoon, Pavel Kagan, Jeroen Pieter Starreveld, Maurice Willem Jozef Etiënne Wijckmans |
2020-10-27 |
| 10503086 |
Lithographic apparatus and device manufacturing method |
Hans Butler, Cornelius Adrianus Lambertus De Hoon, Pavel Kagan, Jeroen Pieter Starreveld, Maurice Willem Jozef Etiënne Wijckmans |
2019-12-10 |
| 10191393 |
Lithographic apparatus, and device manufacturing method |
Jan Steven Christiaan Westerlaken, Marcel Koenraad Marie Baggen, Jeroen Arnoldus Leonardus Johannes Raaymakers, Frank Pieter Albert Van Den Berkmortel, Marc Wilhelmus Maria Van Der Wijst |
2019-01-29 |
| 9575416 |
Lithographic apparatus, device manufacturing method and displacement measurement system |
Engelbertus Antonius Fransiscus Van Der Pasch, Ruud Antonius Catharina Maria Beerens, Martinus Agnes Willem Cuijpers, Christiaan Alexander Hoogendam, Willem Herman Gertruda Anna Koenen +1 more |
2017-02-21 |
| 8368868 |
Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless |
Johannes Petrus Martinus Bernardus Vermeulen, Marcel Koenraad Marie Baggen, Hans Butler, Henrikus Herman Marie Cox, Jan Van Eijk +7 more |
2013-02-05 |
| 8334983 |
Lithographic apparatus and device manufacturing method |
Ruud Antonius Catharina Maria Beerens, Sjoerd Nicolaas Lambertus Donders, Engelbertus Antonius Fransiscus Van Der Pasch, Johannes Petrus Martinus Bernardus Vermeulen |
2012-12-18 |
| 8189174 |
Lithographic apparatus provided with a swap bridge |
Matthias Kruizinga, Frank Auer, Ronnie Herman Anna Hensen |
2012-05-29 |
| 6721035 |
Lithographic projection apparatus |
Hubert Marie Segers, Rudolf M. Boon, Anton Adriaan Bijnagte |
2004-04-13 |
| 6404483 |
Substrate handler for use in lithographic projection apparatus |
Hubert Marie Segers, Rudolf M. Boon, Anton Adriaan Bijnagte |
2002-06-11 |
| 5172160 |
Optical lithographic device having a machine frame with force compensation |
Jan Van Eijk, Gerard Van Engelen, Hendrikus Herman Marie Cox, Henricus E. Beekman |
1992-12-15 |
| 5150153 |
Lithographic device with a suspended object table |
Dominicus Jacobus Petrus Adrianus Franken, Johannes M. M. Van Kimmenade, Cornelis D. Van Dijk, Jan Van Eljk |
1992-09-22 |
