Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12117467 | Probe chip, scan head, scanning probe microscopy device and use of a probe chip | Roelof Willem Herfst, Albert Dekker, Jan Jacobus Benjamin Biemond | 2024-10-15 |
| 11709181 | Probe cassette for holding a probe in storage for use in a scanning probe microscope | Roelof Willem Herfst, Lukas Kramer | 2023-07-25 |
| 11698389 | Probe, method of manufacturing a probe and scanning probe microscopy system | Roelof Willem Herfst, Albert Dekker, Jan Jacobus Benjamin Biemond | 2023-07-11 |
| 11458581 | High-precision linear actuator | Albert Dekker | 2022-10-04 |
| 11320457 | System and method of performing scanning probe microscopy on a substrate surface | Roelof Willem Herfst, Jan Jacobus Benjamin Biemond, Klara Maturova | 2022-05-03 |
| 10634698 | High-precision scanning device | Albert Dekker | 2020-04-28 |
| 7525636 | Lithographic apparatus and exposure method | Dirk-Jan Bijvoet | 2009-04-28 |
| 6721035 | Lithographic projection apparatus | Hubert Marie Segers, Rudolf M. Boon, Fransiscus Mathijs Jacobs | 2004-04-13 |
| 6404483 | Substrate handler for use in lithographic projection apparatus | Hubert Marie Segers, Rudolf M. Boon, Fransiscus Mathijs Jacobs | 2002-06-11 |