| 10331045 |
Position measurement system and lithographic apparatus |
Engelbertus Antonius Fransiscus Van Der Pasch, Robbert Edgar Van Leeuwen |
2019-06-25 |
| 9915880 |
Stage apparatus, lithographic apparatus and method of positioning an object table |
Engelbertus Antonius Fransiscus Van Der Pasch, Andre Bernardus Jeunink, Robbert Edgar Van Leeuwen |
2018-03-13 |
| 9696638 |
Lithographic apparatus |
Engelbertus Antonius Fransiscus Van Der Pasch, Joost Jeroen Ottens, Johannes Henricus Wilhelmus Jacobs, William Peter Van Drent, Frank Staals +2 more |
2017-07-04 |
| 9316928 |
Stage apparatus, lithographic apparatus and method of positioning an object table |
Engelbertus Antonius Fransiscus Van Der Pasch, Andre Bernardus Jeunink, Robbert Edgar Van Leeuwen |
2016-04-19 |
| 9229340 |
Lithographic apparatus |
Engelbertus Antonius Fransiscus Van Der Pasch, Joost Jeroen Ottens, Johannes Henricus Wilhelmus Jacobs, William Peter Van Drent, Frank Staals +2 more |
2016-01-05 |
| 8922756 |
Position measurement system, lithographic apparatus and device manufacturing method |
Willem Herman Gertruda Anna Koenen, Engelbertus Antonius Fransiscus Van Der Pasch, Robbert Edgar Van Leeuwen, Adrianus Hendrik Koevoets |
2014-12-30 |
| 8836913 |
Lithographic apparatus having an encoder type position sensor system |
Peter Paul Steijaert, Wilhelmus Josephus Box, Erik Roelof Loopstra, Engelbertus Antonius Fransiscus Van Der Pasch, Ruud Antonius Catharina Maria Beerens +1 more |
2014-09-16 |
| 8781775 |
Lithographic apparatus and method for correcting a position of a stage of a lithographic apparatus |
Hans Butler, Willem Herman Gertruda Anna Koenen, Engelbertus Antonius Fransiscus Van Der Pasch, Harmen Klaas Van Der Schoot, Marc Wilhelmus Maria Van Der Wijst +2 more |
2014-07-15 |
| 8760615 |
Lithographic apparatus having encoder type position sensor system |
Peter Paul Steijaert, Wilhelmus Josephus Box, Erik Roelof Loopstra, Engelbertus Antonius Fransiscus Van Der Pasch, Ruud Antonius Catharina Maria Beerens +1 more |
2014-06-24 |
| 8730485 |
Lithographic apparatus and device manufacturing method |
Engelbertus Antonius Fransiscus Van Der Pasch, Erik Roelof Loopstra |
2014-05-20 |
| 8687166 |
Lithographic apparatus having an encoder position sensor system |
Peter Paul Steijaert, Wilhelmus Josephus Box, Erik Roelof Loopstra, Engelbertus Antonius Fransiscus Van Der Pasch, Ruud Antonius Catharina Maria Beerens +1 more |
2014-04-01 |
| 8614783 |
Encoder-type measurement system, lithographic apparatus and method to detect an error on or in a grid or grating of an encoder-type measurement system |
Engelbertus Antonius Fransiscus Van Der Pasch, Robbert Edgar Van Leeuwen, Renatus Gerardus Klaver, Martijn Robert Hamers |
2013-12-24 |
| 8570492 |
Lithographic apparatus |
Engelbertus Antonius Fransiscus Van Der Pasch, Johannes Henricus Wilhelmus Jacobs, Joost Jeroen Ottens, Frank Staals, Lukasz Jerzy Macht +2 more |
2013-10-29 |
| 8451454 |
Stage system, lithographic apparatus including such stage system, and correction method |
Willem Herman Gertruda Anna Koenen, Engelbertus Antonius Fransiscus Van Der Pasch |
2013-05-28 |
| 8400617 |
Lithographic apparatus having a substrate support with open cell plastic foam parts |
Engelbertus Antonius Fransiscus Van Der Pasch, Dirk-Jan Bijvoet, Igor Matheus Petronella Aarts |
2013-03-19 |
| 8279407 |
Stage system and lithographic apparatus comprising such stage system |
Ramidin Izair Kamidi, Henrikus Herman Marie Cox, Ronald Casper Kunst, Engelbertus Antonius Fransiscus Van Der Pasch, Marcel François Heertjes +1 more |
2012-10-02 |
| 8248583 |
Lithographic apparatus and calibration method |
Marinus Aart Van Den Brink, Hans Butler, Engelbertus Antonius Fransiscus Van Der Pasch, Marc Wilhelmus Maria Van Der Wijst, Georgo Angelis +4 more |
2012-08-21 |
| 8174671 |
Lithographic projection apparatus and method for controlling a support structure |
Erik Roelof Loopstra, Willem Herman Gertruda Anna Koenen, Engelbertus Antonius Fransiscus Van Der Pasch, Marc Wilhelmus Maria Van Der Wijst |
2012-05-08 |
| 7999912 |
Lithographic apparatus and sensor calibration method |
Engelbertus Antonius Fransiscus Van Der Pasch, Stefan Gertrud Marie Hendriks, Erik Roelof Loopstra, Jacob Willem Vink, Ruud Antonius Catharina Maria Beerens +2 more |
2011-08-16 |
| 7978339 |
Lithographic apparatus temperature compensation |
Tjarko Adriaan Rudolf Van Empel, Marcel Hendrikus Maria Beems |
2011-07-12 |
| 7619207 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Engelbertus Antonius Fransiscus Van Der Pasch, Onno Bram Loopstra |
2009-11-17 |
| 7602489 |
Lithographic apparatus and device manufacturing method |
Engelbertus Antonius Fransiscus Van Der Pasch |
2009-10-13 |
| 7599043 |
Position measurement system and lithographic apparatus |
Wouter Onno Pril, Engelbertus Antonius Fransiscus Van Der Pasch |
2009-10-06 |
| 7557903 |
Lithographic apparatus and device manufacturing method |
Carolus Johannes Catharina Schoormans, Willem Herman Gertruda Anna Koenen, Nicolas Lallemant, Engelbertus Antonius Fransiscus Van Der Pasch, Johannes Mathias Theodorus Antonius Adriaens |
2009-07-07 |
| 7505113 |
Lithographic apparatus and device manufacturing method |
— |
2009-03-17 |