Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7474409 | Lithographic interferometer system with an absolute measurement subsystem and differential measurement subsystem and method thereof | Marcel Hendrikus Maria Beems, Engelbertus Antonius Fransiscus Van Der Pasch | 2009-01-06 |
| 7443511 | Integrated plane mirror and differential plane mirror interferometer system | Marcel Hendrikus Maria Beems, Engelbertus Antonius Fransiscus Van Der Pasch | 2008-10-28 |
| 7348574 | Position measurement system and lithographic apparatus | Wouter Onno Pril, Engelbertus Antonius Fransiscus Van Der Pasch | 2008-03-25 |
| 7310130 | Lithographic apparatus and position measuring method | Tjarko Adriaan Rudolf Van-Empel, Wouter Onno Pril | 2007-12-18 |
| 7283249 | Lithographic apparatus and a method of calibrating such an apparatus | Johannes Mathias Theodorus Antonius Adriaens | 2007-10-16 |
| 7242454 | Lithographic apparatus, and apparatus and method for measuring an object position in a medium | — | 2007-07-10 |
| 7177059 | Device and method for manipulation and routing of a metrology beam | Engelbertus Antonius Fransiscus Van Der Pasch, Marcel Hendrikus Maria Beems, Engelbertus Johannes Jeroen Klijntunte | 2007-02-13 |
| 7136148 | Lithographic apparatus and device manufacturing method | — | 2006-11-14 |