Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11940264 | Mirror calibrating method, a position measuring method, a lithographic apparatus and a device manufacturing method | Carolus Johannes Catharina Schoormans, Luuk Johannes Helena Seelen | 2024-03-26 |
| 11619886 | Position measurement system, interferometer system and lithographic apparatus | Carolus Johannes Catharina Schoormans, Thomas Vo | 2023-04-04 |
| 9470988 | Substrate positioning system, lithographic apparatus and device manufacturing method | Engelbertus Antonius Fransiscus Van Der Pasch, Albert Johannes Maria Jansen, Andre Bernardus Jeunink, Frank Auer, Peterjan Broomans +4 more | 2016-10-18 |
| 8330941 | Calibration method for a lithographic apparatus | Carolus Johannes Catharina Schoormans, Alex Van Zon | 2012-12-11 |
| 7684011 | Calibration method for a lithographic apparatus | Carolus Johannes Catharina Schoormans, Alex Van Zon | 2010-03-23 |
| 7557903 | Lithographic apparatus and device manufacturing method | Carolus Johannes Catharina Schoormans, Emiel Jozef Melanie Eussen, Willem Herman Gertruda Anna Koenen, Nicolas Lallemant, Engelbertus Antonius Fransiscus Van Der Pasch | 2009-07-07 |
| 7352473 | Lithographic apparatus, device manufacturing method, and computer program | Marcel Hendrikus Maria Beems, Engelbertus Antonius Fransiscus Van Der Pasch | 2008-04-01 |
| 7283249 | Lithographic apparatus and a method of calibrating such an apparatus | Emiel Jozef Melanie Eussen | 2007-10-16 |
| 7102736 | Method of calibration, calibration substrate, and method of device manufacture | Carolus Johannes Catharina Schoormans | 2006-09-05 |