Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8614783 | Encoder-type measurement system, lithographic apparatus and method to detect an error on or in a grid or grating of an encoder-type measurement system | Emiel Jozef Melanie Eussen, Engelbertus Antonius Fransiscus Van Der Pasch, Robbert Edgar Van Leeuwen, Martijn Robert Hamers | 2013-12-24 |
| 8390820 | Displacement measurement system having a prism, for displacement measurement between two or more gratings | Erik Roelof Loopstra, Engelbertus Antonius Fransiscus Van Der Pasch | 2013-03-05 |
| 8248583 | Lithographic apparatus and calibration method | Marinus Aart Van Den Brink, Hans Butler, Emiel Jozef Melanie Eussen, Engelbertus Antonius Fransiscus Van Der Pasch, Marc Wilhelmus Maria Van Der Wijst +4 more | 2012-08-21 |
| 7636165 | Displacement measurement systems lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Engelbertus Antonius Fransiscus Van Der Pasch | 2009-12-22 |
| 6577400 | Interferometer | — | 2003-06-10 |