Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11999645 | Optical fibers and production methods therefor | Amir ABDOLVAND | 2024-06-04 |
| 10338483 | Actuator system and lithographic apparatus | Hans Butler | 2019-07-02 |
| 10331045 | Position measurement system and lithographic apparatus | Engelbertus Antonius Fransiscus Van Der Pasch, Emiel Jozef Melanie Eussen | 2019-06-25 |
| 10289011 | Position measurement system, interferometer and lithographic apparatus | Engelbertus Antonius Fransiscus Van Der Pasch | 2019-05-14 |
| 9915880 | Stage apparatus, lithographic apparatus and method of positioning an object table | Engelbertus Antonius Fransiscus Van Der Pasch, Andre Bernardus Jeunink, Emiel Jozef Melanie Eussen | 2018-03-13 |
| 9329501 | Lithographic apparatus, method of deforming a substrate table and device manufacturing method | Yang-Shan Huang, Hans Butler, Jan Van Eijk, Sven Antoin Johan Hol, Engelbertus Antonius Fransiscus Van Der Pasch +3 more | 2016-05-03 |
| 9316928 | Stage apparatus, lithographic apparatus and method of positioning an object table | Engelbertus Antonius Fransiscus Van Der Pasch, Emiel Jozef Melanie Eussen, Andre Bernardus Jeunink | 2016-04-19 |
| 8922756 | Position measurement system, lithographic apparatus and device manufacturing method | Willem Herman Gertruda Anna Koenen, Emiel Jozef Melanie Eussen, Engelbertus Antonius Fransiscus Van Der Pasch, Adrianus Hendrik Koevoets | 2014-12-30 |
| 8675175 | Lithographic apparatus and device manufacturing method | Richard Alexander George, Cheng-Qun Gui, Pieter Willem Herman De Jager, Jacobus Burghoorn | 2014-03-18 |
| 8614783 | Encoder-type measurement system, lithographic apparatus and method to detect an error on or in a grid or grating of an encoder-type measurement system | Emiel Jozef Melanie Eussen, Engelbertus Antonius Fransiscus Van Der Pasch, Renatus Gerardus Klaver, Martijn Robert Hamers | 2013-12-24 |
| 8395755 | Lithographic apparatus and device manufacturing method | Richard Alexander George, Cheng-Qun Gui, Pieter Willem Herman De Jager, Jacobus Burghoorn | 2013-03-12 |
| 7576834 | Lithographic apparatus and device manufacturing method | Richard Alexander George, Cheng-Qun Gui, Pieter Willem Herman De Jager, Jacobus Burghoorn | 2009-08-18 |
| 7385675 | Lithographic apparatus and device manufacturing method | Richard Alexander George, Cheng-Qun Gui, Pieter Willem Herman De Jager, Jacobus Burghoom | 2008-06-10 |
| 7280228 | System and method of measurement, system and method of alignment, lithographic apparatus and method | Gerrit Johannes Nijmeijer, Anastasius Jacobus Anicetus Bruinsma, Christiaan Alexander Hoogendam, Jeroen Thomas Broekhuijse, Sigurd Dressler +3 more | 2007-10-09 |