Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8395772 | Sensor, a table and lithographic apparatus | Henricus Wilhelmus Maria Van Buel, Vitaliy Prosyentsov, Sandra Van Der Graaf, Nina Vladimirovna Dziomkina | 2013-03-12 |
| 7280228 | System and method of measurement, system and method of alignment, lithographic apparatus and method | Gerrit Johannes Nijmeijer, Anastasius Jacobus Anicetus Bruinsma, Christiaan Alexander Hoogendam, Sigurd Dressler, Edwin Eduard Nicolaas Josephus Krijnen +3 more | 2007-10-09 |