Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7352472 | Lithographic apparatus, device manufacturing method, and method for determining z-displacement | — | 2008-04-01 |
| 7315032 | Lithographic apparatus and a device manufacturing method | — | 2008-01-01 |
| 7292310 | Lithographic apparatus and a device manufacturing method | Maarten Dekker | 2007-11-06 |
| 7280228 | System and method of measurement, system and method of alignment, lithographic apparatus and method | Gerrit Johannes Nijmeijer, Anastasius Jacobus Anicetus Bruinsma, Christiaan Alexander Hoogendam, Jeroen Thomas Broekhuijse, Sigurd Dressler +3 more | 2007-10-09 |